Oxford Instruments installs its 200 mm ALD passivation tool at a UK-based microLED microdisplay developer
UK-based Oxford Instruments Plasma Technology announced that it has installed one of its 200 mm atomic layer deposition (ALD) passivation systems at a UK microLED provider, in order to support the customer's latest AR microdisplay development and production. The OIPT system is used to deposit high-K dielectric ultra-thin films for high-density, very high-brightness, low-power and high frame-rate RGB pixel arrays.
OIPT says that its low-damage plasma ALD technology is optimized for smaller dies with smaller active areas, and was shown in some cases by its customers at ICNS to double external quantum efficiency.