Oxford Instruments Plasma Technology

Oxford Instruments Plasma Technology (OIPT), part of the Oxford Instruments group, is a provider of dry etching and deposition solutions for Micro and Nanofabrication, based on the company's plasma, ion beam, etch and atomic layer deposition (ALD) technologies.

OIPT is actively involved in MicroLED development, supplying solutions to key players such as ITRI, Taiwan and VueReal, Canada. The solutions address the demanding requirements for mini and MicroLED fabrication. Products range from clustered cassette-to-cassette platforms for high-throughput production processing to compact stand-alone systems for R&D.