Researchers deposit highly efficient RGB sub-micron nano-pyramid microLEDs using a patterned graphene mask

Researchers from France's CEA-Leti and CNRS institutes have succeeded in growing highly efficient red, green and blue InGaN submicron microLED nano-pyramids.

The researchers have deposited the nanopyramids by using an MOCVD-based technique, and using nanoselective area growth using an in-situ patterned graphene on SiC as a mask. The researchers report that these microLEDs offer high efficiency with the red microLED offering very regular quantum wells emitting at 620 nm with an In content up to 40%.