Aixtron launched a new fully-automated production system, the G10-AsP, targeting the microLED and laser markets. The company says that the G10-AsP ,the first system to offer a fully automated process, enables the highest throughput of its class with uniformity and defect levels never seen before.
Aixtron says that this system will allow, for the first time, the mass production of 10um (or lower) microLED chips, with high performance. The G10-AsP offers a 200mm AsP Batch reactor and comes with In-Situ Cleaning and an automated cassette-to-cassette (C2C) wafer loading.
The Front-End can be equipped with SMIF (Standard Mechanical Interface) pods to further minimize the exposure of the epitaxial wafers to the room environment.
Posted: Jan 26,2023 by Ron Mertens
